Most common AlN substrates have thermal conductivity of 175 W/mk and coefficient of thermal expansion of 4.6x10-6 (20-400°C).
AlN Substrate
Typical Chemical Analysis
|
Element |
Concentration |
|
Fe |
12
ppm |
|
Cu |
27
ppm |
|
Ni |
0
ppm |
|
Zn |
9
ppm |
|
Cr |
3
ppm |
|
Na |
22
ppm |
|
K |
12
ppm |
|
Y |
2.0
(wt%) |
|
Mg |
5
ppm |
|
Ca |
43
ppm |
|
Ti |
7
ppm |
|
V |
43
ppm |
|
Zr |
24
ppm |
|
Si |
152
ppm |
How Aluminum Nitride substrates are manufactured.
For more information:
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Last updated: 28 August 2007 |
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