Chemical Analysis of Typical Aluminum Nitride Substrates

Most common AlN substrates have thermal conductivity of 175 W/mk and coefficient of thermal expansion of 4.6x10-6 (20-400°C).

AlN Substrate Typical Chemical Analysis

Element	Concentration
Fe	12 ppm
Cu	27 ppm
Ni	0 ppm
Zn	9 ppm
Cr	3 ppm
Na	22 ppm
K	12 ppm
Y	2.0 (wt%)
Mg	5 ppm
Ca	43 ppm
Ti	7 ppm
V	43 ppm
Zr	24 ppm
Si	152 ppm

How Aluminum Nitride substrates are manufactured.

For more information:

www.aluminumnitride.com/polished Polished AlN Aluminum Nitride substrates and wafers
www.customdicing.com/aln-links Aluminum Nitride substrate related Web sites
www.acers.org American Ceramic Society
www.edgepolishing.com/aluminum-nitride Aluminum Nitride AlN mechanical and physical properties
www.laserslag.com/aln Aluminum Nitride laser slag
www.valleydesign.com/substrate Aluminum Nitride Ceramic substrates

Return to Home Page: Fused silica and fused quartz substrates and wafers

Fused quartz Fused quartz properties Light pipes Optical glass Optical technology Polished substrates Sapphire refraction index Small optical windows Stock wafers Wafer dicing

Updated: 27 September 2008

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